By widening the data acquisition interval of XPS and applying Spectral Super-Resolution (SSR) to data measured in a short time to achieve the desired resolution, it is possible to significantly shorten the time for XPS measurements without compromising the quality of measurement data.
SSR analysis software enables application to XPS data acquired from devices of various manufacturers.
By widening the measurement interval (energy step) compared to regular measurements and further reducing the acquisition time per point, measurement time is reduced by about 90%.
SSR analysis reconstructs high-resolution spectra from low-resolution spectra. This not only improves resolution but also reduces noise, ensuring the quality of measurement data.
Data acquired from various XPS devices can be input into the analysis software for SSR analysis.
By using SSR analysis, we have been able to reduce XPS measurement and analysis time by more than half, thus eliminating bottlenecks in research and development.
It has become possible to perform damage-free XPS measurements without using ion neutralization, thereby expanding the range of applications for XPS.
Acceleration
of XPS measurement
Shorten the measurement time by measuring at low resolution and increasing the resolution with SSR
Accurate analysis
of EELS data
Accurately reconstruct EELS spectra with correcting energy shift
Accurate measurement
by portable apparatus
Achieve accurate measurement by portable and easy apparatus